Electronic grade disilane (Si2H6) industry standards continue to improve, and there is huge room for domestic substitution in the Chinese market

Electronic grade disilane (Si2H6) is a special electronic gas. It usually uses monosilane as raw material and is produced through processes such as glow discharge, cooling recovery, and low-temperature distillation. Electronic grade disilane has a high silicon content and has the advantages of low deposition temperature and fast deposition speed. It is widely used in solar cells, integrated circuits, semiconductors and many other fields.

The main preparation methods of electronic grade disilane include direct synthesis of silane, magnesium silicide method (Komatsu method) and hexachlorodisilane reduction method. The direct synthesis method of silane refers to using monosilane as the main raw material, and the finished product is obtained by methods such as glow discharge, thermal decomposition, and atomic excitation; the magnesium silicide method refers to using hydrogen chloride (HCl) and magnesium silicide (Mg2Si) as the main raw materials to make the two After full reaction, the finished product is obtained by separation; the hexachlorodisilane reduction method refers to using lithium aluminum hydride reducing agent to reduce hexachlorodisilane, and then undergoing low-temperature distillation to obtain the finished product.

Electronic grade disilane is a toxic gas that requires strict control during production and application. In recent years, the Chinese government has attached great importance to the development of the electronic grade disilane industry. In May 2023, the Ministry of Industry and Information Technology released the “First Batch of Industry Standards Revision and Foreign Language Version Project Plan in 2023”. The document clearly included “2023-0010T-S Electronic Grade Disilane” into the “New Generation Information Technology-Integrated Circuit” standard. The project plan has a project cycle of 24 months. In the future, as industry standards are gradually implemented, my country’s electronic grade disilane industry will gradually develop in a standardized direction.

According to the “2023-2028 China Electronic Grade Disilane (Si2H6) Industry Market In-depth Research and Development Prospects Forecast Report》shows that electronic grade disilane is widely used in solar cells, integrated circuits, semiconductors and other fields. In the field of solar cells, electronic grade disilane can be used to produce amorphous silicon wafers; in the field of integrated circuits, electronic grade disilane can be used to produce high-performance chips; in the field of semiconductors, electronic grade disilane can be used in semiconductor PECVD and LPCVD film forming processes middle. Benefiting from the accelerated development of downstream industries, the market demand for electronic grade disilane is increasingly strong.

The electronic grade disilane industry has high technical barriers. There are only a small number of companies with large-scale production capabilities in my country, and demand is highly dependent on imports. Jinhong Gas, Duofuoduo, Huzhou Xunding, Quanjiao Yagetai, Heyuan Gas, etc. are the main players in my country’s electronic grade disilane market. Polyfluoro is a representative enterprise of electronic grade disilane in my country, with an annual production capacity of 100 tons under construction.

Industry analysts said that as a special electronic gas, electronic grade disilane has broad application prospects and the industry development speed is accelerating. Due to factors such as high technical barriers and high production costs, my country’s electronic grade disilane is highly dependent on imports. In the future, with the continuous improvement of industry standards and the further improvement of the independent research and development capabilities of local enterprises, the localization process of my country’s electronic grade disilane market will accelerate.